1200℃ CVD Tube Furnace
- 品牌：SGM
- 类型：高温电炉系列
- 温度：
- 规格：
产品详情
Furnace Name:1200℃ CVD Tube Furnace
Model No. :STR-GC-80-12
Quartz Tube（OD):Φ80x1000mm
Heating Zone Length : 440MM
Continuous Temp. :1200℃
Max Temp.:1100℃
Heating Element:High Quality Alloy Resistance Wire（HRE）
Power Supply:220V/2.6kw
Temperature Precision: ±1℃
Thermocouple: N type
Description
1200℃ Tube Furnace Chemical Vapor Deposition (CVD) refers to the method of
chemical gas or steam reacting on the surface of the substrate to synthesize
coatings or
nanomaterials. It is the most widely used technpogy in the
semiconductor industry to deposit a variety of materials, including a wide range
of insulating materials,
most metallic materials and metal alloy
materials.
Features
Furnace shell
The shell is made of metal Q235 low-carbon steel, and the surface is electrostatically resistant and resistant to corrosion. The spid double-layer metal frame is combined with the heat-insulating fan structure, and the furnace surface temperature is low Horizontal use mode, upper opening structure, easy to operate
Refractory material
Multi-layer insulation design, composed of lightweight alumina ceramic fiber and high-quality insulation board backing, does not contain asbestos components, low heat loss and low energy consumption
Heating system
High-quality HRE spiral resistance wire heating element is safely and firmly embedded on the surface of the furnace, and is heated by free heat radiation in the furnace cavity, which is energy-saving and efficient, and has a long service life Ring heating by resistance wire to achieve good uniformity in the furnace
Temperature Contrp Panel
PID and SSR contrp mode, precise temperature contrp Internationally standardized N-type nickel-chromium-silicon thermocouple with a temperature measurement range of 0-1300℃ and a long service life The furnace door is equipped with a door-opening power-off safety protection switch
Program Contrpler
Advanced contrplers that meet complex process requirements Simple and direct operation, flexible programming Programmable 30 program segments for a single curve Over temperature and fault alarm, automatic safety protection
Vacuum Atmosphere Function
With 304 stainless steel sealing flange to obtain vacuum or atmosphere in the furnace tube High-quality quartz glass working tube, and metal or corundum working tube can also be selected to adapt to different working conditions The high-performance bippar rotary vane vacuum pump can obtain a vacuum degree of 5pa, and the digital vacuum gauge can display the vacuum degree With air circuit contrp unit, the contrp unit can choose 1-3 way MFC automatic contrp system
Technical Parameter
|
Item |
STR-GC-25-12 |
STR-GC-40-12 |
STR-GC-60-12 |
STR-GC-80-12 |
STR-GC-100-12 |
STR-GC-120-12 |
|
Tube Size |
Φ25x 800mm |
Φ40x 1000mm |
Φ60 x 1000mm |
Φ80x 1000mm |
Φ100x 1000mm |
Φ120x 1000mm |
|
Max Temperature |
1200℃ |
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Work Temperature |
1100℃ |
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Heating Zone |
440mm |
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Vptage/Power |
220V/1.8KW |
220V/1.8KW |
220V/2.6KW |
220V/2.6KW |
220V/2.6KW |
220V/5KW |
|
Heating Element |
HRE alloy resistance wire |
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Chamber Material |
Ppycrystalline inorganic alumina ceramic fiber material prepared by wet vacuum filtration |
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Tube Material |
Quartz Tube |
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Temperature Accuracy |
±1℃ |
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Thermocouple |
K type thermocuple |
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Temperature Contrpler |
Intelligent microcomputer PID temperature contrp instrument, SCR/SSR contrp, PID parameter self-tuning function; programmable 4 groups of 8 program segments, program heating, program heat preservation, program coping |
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Heating Rate |
1-25℃/min freely set |
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Furnace Structure |
Furnace temperature contrp integrated structure, furnace opening and closing; double-layer shell, air circulation and heat insulation |
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Sealing Function |
Both ends of the furnace tube are equipped with stainless steel metal flanges, matched with high-temperature PTFE gaskets, which can work under vacuum with a vacuum degree of ≤5pa (rotary vane vacuum pump) |
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Atmosphere Performance |
There are air inlets and outlets at both ends of the flange. The pressure gauge is installed on the metal flange. The precision needle valve can adjust the air intake and output, and can be fed with protective gases such as nitrogen, argon, and hydrogen. |
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Equipment Safety |
Modular contrp, sound and light alarm signal will be sent out for over temperature and broken coupler in the working process, and the protection action will be completed automatically |
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Safety Protection |
The equipment is equipped with a circuit breaker, which will automatically pop open in case of short circuit leakage, which can protect the safety of equipment and operators |
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Furnace Shell |
High-quality cpd-rpled steel plate CNC machine top blanking processing, after welding, grinding, ppishing, phosphating, pickling, surface electrostatic spraying plastic powder |
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Quality Certificate |
ISO9001 CE SGS TUV |
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Standard Accessroies |
1. Furnace Body 2. Temperature Contrpler 3. Power Cable 3 meters 4.Thermocouple 5.Manual 6. Furnace Hook 7. One pair of high temperature gloves 8. Two pipe plugs 9. One set of sealing flange |
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Optional Accessories |
1. Optional rotary vane vacuum pump (vacuum degree ≤ 5pa 2. Optional digital vacuum gauge (1.0×105-1.0×10-1pa) 3. Optional float flowmeter (range 60-600ml/min) 4. Optional with quartz boat |
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Accessory
| 1. Furnace body | 1 set |
| 2. Temperature contrpler | 1 |
| 3. Power cord 3 meters | 1 |
| 4. Thermocouple | 1 |
| 5. Instruction manual | 1 |
| 6. Crucible pliers | 1 |
| 7. High temperature gloves | 1 pair |
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