产品详情

Split Tube furnace	1	1200oC Max. working temperature for < 60 minutes
	2	1100oC Max for continuous heating
	3	30 segments programmable precision digital temperature controller
	4	440 mm length single heating zone and 150 mm length constant temperate zone
	5	High purity quartz tube optional from ( click optional bar to choose )
	6	3.14"OD x 2.83"ID x 48'' Length
	7	One pair of vacuum sealed flange with valves
	8	Input power: 208 – 240V AC input, single phase at max. 4KW
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Plasma RF Power supply	1	Output Power: 5 -500W adjustable with ± 1% stability
	2	RF frequency: 13.56 MHz ±0.005% stability
	3	Reflection Power: 200W max.
	4	Matching: Automatic
	5	RF Output Port: 50 Ω, N-type, female
	6	Noise: <50 dB.
	7	Cooling: Air cooling.
	8	Power : 208-240VAC, 50/60Hz
	9	Note: This RF power supply can accept 50 - 80 mm Max. quartz tube by changing flange
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Anti-corrosive Pressure Gauge	1	3.8x10-5 to 1125 Torr measurement range
	2	Anti-corrosive, gas-type independent
	3	High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
	4	Fast atmospheric detection eliminates waiting time and shortens process cycle
	5	Easy to exchange plug & play sensor element
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Vacuum Pump and valve	1	Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed in bottom case with max. vacuum pressure 10-2 torr.
	2	KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve
	3	Digital vacuum pressure gauge and display are installed with the furnace
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Mass Flow meters	1	Four precision mass flow meters (0.02% accuracy) with digital display are installed on the bottom case to control gas flow rate automatically.
	2	MFC 1: Gas flow range from 0~100 sccm
	3	MFC 2&3: Control range from 0~200 sccm
	4	MFC 4: Control range from 0~500 sccm
	5	One gas mixing tank is installed on bottom case with liquid release valve
	6	4 stainless steel needle valves is installed on left side of bottom case to control 4type gases mixing manually
	7	Gas inlet fitting: four 1/4NPS
	8	Gas outlet fitting: four 1/4NPS
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