1700C High Vacuum Three Zone Tube Furnace:CVD Tube Furnace

Product Overview for 3 Zone Tube Furnace

PTC D100/1500/17/3 is a CE certified OD100mm large three zones tube furnace with complete vacuum sealing flange and water cooling devices. Each heating zone is 20" in length and controlled by three precision 30 segments of digital temperature controllers independently. The heating zones are heated by powerful 1800 MoSi2 elements up to 1700°C. The tube furnace can create the various thermal gradient by adjusting three zones temperature. It is an excellent furnace to prepare functional materials under thermal gradient, and also can be used for nano or film growth by CVD.

Main Features

• Tmax 1700 °C
• Three independent heating zones, whole length 1500mm
• Dual steel structure, non-split furnace chamber to protect minium heat loss
• Multiple atmosphere processes in a single cycle are available
• Max Vacuum level achieve 10E-3 torr worked with molecular pump
• Fiber-insulated chamber with powerful MoSi2 heating elemets ensure uniform temperature ensure uniform temperature
• Shimaden PID temperature controller with programmable 30 segments
• SS304 vacuum sealing flanges with valves and pressure meter included
• Dual flanges support provides better sealing and longer tube life
• Long life type B thermocouple
• CE certified, standard

Ramping, Dwelling, Cooling Curves for 1700 Series 3 zone CVD Tube Furnaces

Safety Measures

• Built-in ammeter and dual voltmeters for easy monitoring and troubleshooting.
• Overheat protection shuts down the tube furnace if temperature is outside of acceptable range (refer to controller's manual) or when the thermocouple is broken or malfunctions
• Power failure protection resumes furnace operation right after the point of failure when power is reestablished
• Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot

Product Gallery

Front View for 3 Zone CVD Tube Furnace 1700 degree C

Side view for 1700C 3 zone CVD Tube Furnace with water cooling device

Details for 1700C 3 zone CVD Tube Furnace with water cooling flange and molecumer pump unit

Technical Specifications

Application Notes

• Don't fill any explosive gasses such as Hydrogen or Methane into the furnace tube without necessary safety controls and supervision
• 1700C tube furnaces with alumina tube are designed for use under vacuum and low pressure; 0.2 bars / 3 psi / 0.02 MPa
• To minimize the cracking rate of the ceramic tubes, please change the position (mark four points on the tube) each batch
• Small cracks may appear on the surface of the refractory ceramics over extended use. This is a normal occurrence and the cracks may be repaired with alumina coating

Size Comparison