产品型号：plasma enhanced chemical vapor deposition (PECVD) tube furnace system
电炉类型：真空炉
电炉规格：
加热温度：
电炉系列：赛特瑞电炉
应用范围：。
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Split Tube furnace
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1200oC Max. working temperature for < 60 minutes |
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1100oC Max for continuous heating |
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30 segments programmable precision digital temperature controller |
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440 mm length single heating zone and 150 mm length constant temperate zone |
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High purity quartz tube optional from ( click optional bar to choose ) |
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3.14"OD x 2.83"ID x 48'' Length |
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One pair of vacuum sealed flange with valves |
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Input power: 208 – 240V AC input, single phase at max. 4KW |
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Plasma RF Power supply
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Output Power: 5 -500W adjustable with ± 1% stability |
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RF frequency: 13.56 MHz ±0.005% stability |
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Reflection Power: 200W max. |
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Matching: Automatic |
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RF Output Port: 50 Ω, N-type, female |
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Noise: <50 dB. |
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Cooling: Air cooling. |
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Power : 208-240VAC, 50/60Hz |
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Note: This RF power supply can accept 50 - 80 mm Max. quartz tube by changing flange |
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Anti-corrosive Pressure Gauge
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3.8x10-5 to 1125 Torr measurement range |
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Anti-corrosive, gas-type independent |
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High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection |
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Fast atmospheric detection eliminates waiting time and shortens process cycle |
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Easy to exchange plug & play sensor element |
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Vacuum Pump and valve
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Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed in bottom case with max. vacuum pressure 10-2 torr. |
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KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve |
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Digital vacuum pressure gauge and display are installed with the furnace |
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Mass Flow meters
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Four precision mass flow meters (0.02% accuracy) with digital display are installed on the bottom case to control gas flow rate automatically. |
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MFC 1: Gas flow range from 0~100 sccm |
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MFC 2&3: Control range from 0~200 sccm |
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MFC 4: Control range from 0~500 sccm |
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One gas mixing tank is installed on bottom case with liquid release valve |
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4 stainless steel needle valves is installed on left side of bottom case to control 4type gases mixing manually |
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Gas inlet fitting: four 1/4NPS |
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Gas outlet fitting: four 1/4NPS |
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