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洛阳赛特瑞智能装备有限公司

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  • Two Zone IR Heated RTP Tube Furnace(4'' ID ) with Slide-able Sample HolderOTF-1200X-IR-IISL

Two Zone IR Heated RTP Tube Furnace(4'' ID ) with Slide-able Sample HolderOTF-1200X-IR-IISL

产品型号:Two Zone IR Heated RTP Tube Furnace(4'' ID ) with Slide-able Sample HolderOTF-1200X-IR-IISL

电炉类型:高温电炉系列

电炉规格:

加热温度:

电炉系列:赛特瑞电炉

应用范围:。


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产品简介 / Introduction

Two Zone IR Heated RTP Tube Furnace (4'' ID ) with Slide-able Sample Holder -OTF-1200X-IR-IISL

OTF-1200X-IR-IISL is a dual-zone IR heated RTP tube furnace with 4" ID quartz tube and slidable sample holder for easy operation. It is capable of achieving a max. the heating rate of 50°C/s and a cooling rate of 117°C/min. The furnace is designed for growing two-dimension materials via HPCVD, where one heating zone is used as a solid evaporating source and another zone for sample deposition..

SPECIFICATIONS

Furnace Features(optional) 、Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C. 、Heated by shortwave IR tube lamps for fasting heating 、Two heating zones, 195 mm each, total 390 mm in length for HPCVD 、The sample holder is slidable ininside retractable bellows, which can achieve fast heating or cool under vacuum or controlled atmosphere ( optional) 、Vacuum flanges and thedigital vacuum gaugeare installed for immediate use.
Power 、AC 208-240V, single-phase, 50/60 Hz 、MAX 24 KW, 100 A power supply required.
Heating Element 、16 pcs 1.5 Kw Halogen light tube, ( Dia. =10mm, L=390mm ) 、Standard working life: 2000 hrs. ( depends on heating rate ) 、The halogen light tube is consumable. Please click the picture left to order spare.
Max. Temperature 、900℃max (< 10 minutes ) 、800℃(< 30 minutes ) 、600℃( continuous )
Temperature Accuracy 、+/ - 1°C
Max. Heating Rate 、RT ~ 800ºC: 50 ºC/s 、800ºC~ 900ºC: 10ºC/s
Max. Cooling Rate 、60ºC/min under 200 mTorr environment 、117ºC/min under atmospheric pressure 、10 °C/min slowest
Process Tube Size 、High purity fused quartz tube 、Φ110 (OD) × Φ106 (ID)× 740 (L) mm
Sliding Rails 、Dual sliding rails made of Cr plated steel 、Sliding rail length: 400 mm
Thermocouple 、Two K type, 1/4" Diax24" length

Temperature Controller

、Two temperature controllers for controlling two zones independently via SCR 、PID automatic control with up to 30 programmable segments for precise control of heating rate, cooling rate and dwell time. 、Built-in overheating amp; thermocouple broken protection. 、Over-temperature protection and alarm allow for operation without attendant(s). 、、+/- 1 ºC temperature accuracy. 、RS485 Communications Port. 、PC Control: º An MTS-02control moduleis included for PC control on this furnace. º The new version of PC module is now compatible with Lab View 05/08/2014 º A laptop PC can be ordered for $500 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping. For more information please click here

Vacuum Flanges

、SS water-cooled flanges on the both sides. 、Left flange: 1/4" thermocouple feedthrough 1/4'' tube fitting 、Right flange: KF 25 port with a right angle gate valve for vacuum pump Needle valve with barb fitting as a venting port •A digital vacuum gauge is included 、Retractable bellow design is optional on the left flange, which allows sample retrieving for fast cooling under vacuum or inert gas.

Vacuum Level

•Limited by the vacuum pump º 10^-2 torr can be achieved by the mechanical pump º 10^-4 torr can be reached by molecular pump 、The pump is not included. ( please click the picture below to order )

Water Chiller (optional)

、Cooling water is required for the flange set. 、Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure gt; 25 PSI. 、We suggest EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below).

Dimensions

1000mm×540mm×800mm

Net Weight

、~180 Kg

Shipping Weight

、500 lbs

Warranty

、One year limited manufacturer's warranty(Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order replacements at related products below).

Laptop, software amp; WiFi Control (Optional)

、Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use. 、 Temperature Control System (EQ-MTS01)enables the user to edit temperature profile, manage heat-treatment recipe, record and plot data for STR-furnaces. 、A wireless remote control provides up to 300 meters of operating range. 、The above features are available upon request at an extra cost (up to $1,000). Please contact us for more information. 、Note: The software is only compatible with Yudian Temperature Controller

Compliance

、CE Certified 、NRTL(UL61010) or CSA certification is available upon request at extra cost. ( please click marks below to learn details )

Application NotesClick here to learnthe installation of a gas regulator

、Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.12 MPa (absolute pressure). 、Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.Click here to learnthe installation of a gas regulator. 、The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube 、Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C 、Click here to learnhow to set up a quartz/ ceramic tube and vacuum flange for STR-Tube furnace. 、Quartz tubes should be replaced after every 10th use to ensure the best performance. 、Samples should never be placed on the tube directly; please order crucibles and boats fromhere. 、After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can below.

Operation Instructions

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