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3 Zone Tube Furnace with 6＂11＂ Quartz tube and Flange(1100℃, 12＂+12＂+12＂ Heating Zone)TF1100X-XX-III

产品型号：3 Zone Tube Furnace with 6＂11＂ Quartz tube and Flange(1100℃, 12＂+12＂+12＂ Heating Zone)TF1100X-XX-III

电炉类型：高温电炉系列

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电炉系列：高温马弗炉

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产品简介 / Introduction

3 Zone Tube Furnace with 6" - 11" Quartz tube and Flange (1100°C, 12"+12"+12" Heating Zone) - TF1100X-XX-III

Specification

Model	TF1100X-6-III	TF1100X-8.5-III	TF1100X-11-III
Fused quartz tube size	High purity quart tubeWarning: quartz tube is fragile, please handle with care. Warranty does not cover broken tube by use
	Size: 152 O.Dx143 I.Dx1300mm L(6" O.Dx5.6" I.Dx51" L)	Size: 216 O.Dx206 I.Dx1300mm L(8.5" O.Dx8.1" I.Dx51" L)	Size: 279 O.Dx269 I.Dx1300mm L(11" O.Dx10.6" I.Dx51" L)
	NOTE: The customers must define one tube size before purchase. It is very difficult to change the tube size after because the chamber liners need to be replaced in order to fit the different tube size.
Quartz boats (optional)	max. 4" wafer boat compatible	Max. 6" wafer boat compatible	Max. 8" wafer boat compatible
Furnace structure	Double layer steel casing with air cooling. The surface temperature of the case is ＜ 70°C.Refractory fibrous alumina insulation liner for maximum energy saving.Heating element: NiCrAl Resistance WireTwo fibrous ceramic tube blocks are included for blocking heat radiation from inside tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating) This furnace can be used as annealing or diffusion furnace for 8" wafer use a quartz boat at related product below Holding 8" wafer
Heating zone	Total heating zone length 900 mm (36")Three zones: 300 mm + 300 mm + 300mm (12" per zone)Constant temperature zone:750 mm (if three zones are in the same temperature within +/- 3°C) longitude direction600 mm (if three zones are in the same temperature within +/- 1°C) longitude direction+/- 3 oC along the cross section
Working temperature	Max heating temperature: 1100℃( ＜ 1 hour )Normal working temperature: 200~1000°CMax heating amp; cooling rate: 10°C/minTemperature uniformity: please click the pic left to enlarge
Temperature control	Three digital controllers with PID/self-tuning functions and 30 segments programmable. Thermocouple: three K type thermocouples (one for each zone)Control accuracy: +/- 1°C
European Temperature Controllers (optional upgrade)	1 heating channel1 programs of 8 or 24 segmentAlarm Relay: Form 'A' and Form ‘C’ built-in Digital Communications: RS485Temperature Accuracy: ± 0.1ºCRecipes:Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.
Vacuum sealing amp; Flange	A pair of SS vacuum sealing flange (Hinged Type) and 4 pieces of high temp-resistance silicon O-ring are included.Left Side Flange: Vacuum gauge, stainless steel needle valves and 1/4" barbed hose fitting.Right Side Flange: KF40 vacuum port with KF-40 Vacuum Right-Angle Valve for easy connection to KF40 bellows and pump. ( If use pump with KF25 port, you will need a adapter KF40-KF25.One 1/4" OD thermal couple insert port is built in the flange for easy temperature calibration.Vacuum Level: 10-2 torr by heavy duty mechanical pump and 10-4 torr by regular turbo-pump. 5x10-7 torr can be reached by 700 L/s high speed turbo pump and modified flange adaptor
OptionalsClick to enlarge	The tube furnace should be calibrated regularly to maintain the temperature accuracy and uniformity. We are providing a simple calibration kit for you to complete this job at extra cost The complete calibration kit includes (click the underline to see details):One 48"L ( 1/4"OD) K type calibration thermocoupleOne Omega temperature calibrator5 feet long thermocouple power extension wireYou may consider to order turbo pump for hi-vacuum upto 10-5 torr ( click pic below right to order )
Rated Voltage	Single Phase, 220V AC, 50/60 HzAWG 8# Power cord is included (without plug)
Power consumption	Max. 8KW (50A breaker required)
Product Dimension	1879 Lx680Wx920 H mm (74" Lx24.5" Wx37" H)
Net weight	200kg
Shipping dimension	80"x40"x70"
Shipping weight	800 lbs
Warranty	One year limited warranty for electrical parts. ( Consumable parts such as processing tubes, o-rings and quartz tube are not covered by the warranty)You may order replacement quartz tube at the link below
Laptop, software amp; WiFi Control(Optional)	Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use. Temperature Control System (EQ-MTS01)enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for STR-furnaces.A wireless remote control provides up to 300 meters operating range.Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.Note: The software is only compatible with Yudian Temperature Controller
Compliance	CE CertifiedNRTL or CSA Certification is available upon request, additional charges will apply
NOTE	In order to obtain accurate temperature inside the tube furnace,calibration of temperature is require before use, please click here to learnHow to set up ceramic tube and vacuum flange for STR-Tube furnace
Operation Instructions
Warning	Tube furnaces with quartz tubes are designed for using under vacuum and low pressure ＜ 0.2 bar / 3 psi / 0.02 MPa or 0.12 MPa (absolute pressure). Attention: A two stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation.Click here to learnthe installation of a gas regulator.Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°CThe flow rate for gases should be limited to＜200 SCCM (or 200ml/min) for reducing thermal shocks to the tube

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